Bi-stable RF MEMS switch with low actuation voltage
نویسندگان
چکیده
Mobile technologies have relied on RF switches for a long time. Though the basic function of the switch has remained the same, the way they have been made has changed in the recent past. In the past few years work has been done to use MEMS technologies in designing and fabricating an RF switch that would in many ways replace the electronic and mechanical switches that have been used for so long. This work describes a design and fabrication process for an RF MEMS switch that can handle higher RF power with CMOS compatible operating voltages.
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